We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In2O3) doped polycrystalline tin dioxide (SnO2) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).

This content is only available via PDF.
You do not currently have access to this content.