We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In2O3) doped polycrystalline tin dioxide (SnO2) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).
Study of Design Parameters in Hydrogen Microsensors Integrated With Metal Semiconductor Nanoparticles
- Views Icon Views
- Share Icon Share
- Search Site
Zhang, P, Deshpande, S, Medelius, PJ, Seal, S, & Cho, HJ. "Study of Design Parameters in Hydrogen Microsensors Integrated With Metal Semiconductor Nanoparticles." Proceedings of the ASME 2007 International Mechanical Engineering Congress and Exposition. Volume 11: Micro and Nano Systems, Parts A and B. Seattle, Washington, USA. November 11–15, 2007. pp. 541-544. ASME. https://doi.org/10.1115/IMECE2007-43803
Download citation file: