There is an increasing interest in performing assembly of microsystems (i.e. non-destructive transportation, precise manipulation, and exact positioning of microcomponents) by flexible microrobots. A microrobot-based microassembly desktop station is being developed at the University of Karlsruhe. Several prototypes of piezoelectric driven microrobots and a design of the flexible microassembly desktop station were already presented. In this paper, new implementation results of a computer vision based automatic control system of a mobile microrobot with an integrated flexible manipulator are discussed. The operations of the robot manipulator take place under a microscope equipped with a CCD-camera. A major drawback of this system is its lack of depth information. For this reason, the sensor system has been enhanced by a line laser, using laser triangulation. The set-up of the modified sensor system is described. The measuring principle is based on a method called sheet of light triangulation, a variation of standard triangulation. This approach is described in detail; its advantages and limitations are discussed.

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