Abstract

In the present study, an out-of-plane motion actuator driven by the electrostatic force is designed and fabricated. The electrostatic force generated by the gap closing electrodes and the comb electrodes will be studied. Moreover, a lever motion transmitting mechanism is proposed to modulate the motion of the actuators. Although the space between the driving electrodes is limited, the lever motion transmitting mechanism could enlarge the traveling distance. The applications of the out-of-plane motion actuator are remarkably increased due to the assistant of the transmitting mechanism.

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