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Keywords: thermal reflow
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Proceedings Papers

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 689-693, August 3–6, 2008
Paper No: DETC2008-49647
... 24 07 2009 In this paper, we present a new thermal reflow method to transform photresist pillars into the shapes of spherical caps and month-eyes. We also investigated the effect of this sub-wavelength structure morphology on anti-reflection properties of these photoresist patterns...