Topics: Particulate matter, Ultrasonics, Ultrasonic cleaning, Contamination, Chemical vapor deposition, Integrated circuit fabrication, Reactive-ion etching, Semiconductor wafers, Semiconductors (Materials)

Topics: Cutting, Lasers, Microelectromechanical systems, Micromachining, Optimization, Silicon, Taguchi methods, Machining, Surface roughness, Manufacturing

Topics: Carbon, Displacement, Manufacturing, Microelectromechanical systems, Nanotubes, Sensors, Carbon nanotubes, Wire, Bending (Stress), Tungsten

Topics: Sensors, Silicon-on-insulator, Displacement, Manufacturing, Modeling, Reactive-ion etching, Reliability, Resolution (Optics), Stiffness, Transducers

Topics: Actuators, Manufacturing, Microactuators, Reactive-ion etching, Semiconductor wafers, Silicon-on-insulator, Transducers

Topics: Electric fields, Excitation, Microbeams, Vibration, Electrodes, Silicon-on-insulator, Stiffness, Actuators, Deflection, Fittings

Topics: Actuators, Atomic force microscopy, Bending (Stress), Cables, Degrees of freedom, End effectors, Microassembling, Microelectromechanical systems, Probes, Reactive-ion etching

Topics: Design, Manufacturing, Ceramics, Optimization, Slurries, Strength (Materials), Casting, Compliant mechanisms, Density, Dimensions

Topics: Elastomers, Manufacturing, Polyester fibers, Adhesion, Fibers, Friction, Glass, Lithography, Nanoscale phenomena, Reactive-ion etching

Topics: Actuators, Displacement, Electrodes, Etching, Flanges, Geometry, Manufacturing, Microactuators, Microelectromechanical systems, Reactive-ion etching

Topics: Actuators, Approximation, Arches, Bifurcation, Buckling, Crystals, Deflection, Design, Electric potential, Electromechanical effects

Topics: Biomedicine, Design, Filters, Fluids, Microelectromechanical systems, Modeling, Biological tissues, Biomedical engineering, Computational fluid dynamics, Design methodology