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Proceedings Papers

Prototyping Electrostatic Scanning Force Microscope

Hamidreza Nafissi, Raafat Mansour, Eihab M. Abdel-Rahman
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A015, August 26–29, 2018
Paper No: DETC2018-86428
DOI: https://doi.org/10.1115/DETC2018-86428
View Paper titled, Prototyping Electrostatic Scanning Force Microscope
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Topics: Microscopes, Probes, Atomic force microscopy, Actuators, Electrostatic actuators, Locks (Waterways), Printed circuit boards, Resonance, Separation (Technology), Signals
Proceedings Papers

Application of Nonlinear Active Disturbance Rejection Control to One-DOF Electrostatic Actuators

Prasanth B. Kandula, Lili Dong
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A004, August 6–9, 2017
Paper No: DETC2017-67190
DOI: https://doi.org/10.1115/DETC2017-67190
View Paper titled, Application of Nonlinear Active Disturbance Rejection Control to One-DOF Electrostatic Actuators
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Topics: Electrostatic actuators, Control equipment, Uncertainty, Feedback, Microfabrication, Modeling, Packaging, Simulation results, Stability, State estimation
Proceedings Papers

A Low Voltage Electrostatic Micro Actuator for Large Out-of-Plane Displacement

Shahrzad Towfighian, Siyuan He, Ridha Ben Mrad
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A015, August 17–20, 2014
Paper No: DETC2014-34283
DOI: https://doi.org/10.1115/DETC2014-34283
View Paper titled, A Low Voltage Electrostatic Micro Actuator for Large Out-of-Plane Displacement
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Topics: Displacement, Microactuators, Actuators, Mirrors, Design, Electrical measurement, Electrostatic actuators, Finite element model, Lenses (Optics), Modeling
Proceedings Papers

Low Voltage Electrostatic Actuation for MEMS Actuator Using Frequency Modulation

Sangtak Park, Mahmoud Khater, Eihab Abdel-Rahman
Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A015, August 4–7, 2013
Paper No: DETC2013-13376
DOI: https://doi.org/10.1115/DETC2013-13376
View Paper titled, Low Voltage Electrostatic Actuation for MEMS Actuator Using Frequency Modulation
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Topics: Actuators, Microelectromechanical systems, Circuits, Electrostatic actuators, Resonance, Stability, Capacitance, Q-factor, Signals
Proceedings Papers

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Sangtak Park, Eihab Abdel-Rahman
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 119-126, August 12–15, 2012
Paper No: DETC2012-71268
DOI: https://doi.org/10.1115/DETC2012-71268
View Paper titled, Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit
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Topics: Circuits, Displacement measurement, Resonance, Electrostatic actuators, Actuators, Capacitance, Computer simulation, Delays, Displacement, Feedback
Proceedings Papers

Stabilization of Electrostatic Actuators Through Variable Gain Amplifier

Sangtak Park, Eihab Abdel-Rahman
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 127-131, August 12–15, 2012
Paper No: DETC2012-71274
DOI: https://doi.org/10.1115/DETC2012-71274
View Paper titled, Stabilization of Electrostatic Actuators Through Variable Gain Amplifier
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Topics: Electrostatic actuators, Capacitance, Circuits, Resonance, Feedback, Design, Electrodes, Q-factor, Robustness
Proceedings Papers

Experimental Validation for an Extended-Stability Electrostatic Actuator

S. Towfighian, A. Seleim, E. M. Abdel-Rahman, G. R. Heppler
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 631-638, August 15–18, 2010
Paper No: DETC2010-28983
DOI: https://doi.org/10.1115/DETC2010-28983
View Paper titled, Experimental Validation for an Extended-Stability Electrostatic Actuator
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Topics: Electrostatic actuators, Stability, Electrodes, Control equipment, Feedback, Actuators, Closed loop systems, Deflection, Displacement, Dynamic response
Proceedings Papers

A Low Voltage Controller for a Chaotic Micro Resonator

S. Towfighian, G. R. Heppler, E. M. Abdel-Rahman
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 639-644, August 15–18, 2010
Paper No: DETC2010-28990
DOI: https://doi.org/10.1115/DETC2010-28990
View Paper titled, A Low Voltage Controller for a Chaotic Micro Resonator
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Topics: Control equipment, Chaos, Wells, Actuators, Cantilever beams, Electrodes, Attractors, Design, Dynamic response, Electromotive force
Proceedings Papers

Modeling Electrostatic Actuator Pull in Behavior With Proper Orthogonal Decomposition

David Binion, Xiaolin Chen
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 571-577, August 15–18, 2010
Paper No: DETC2010-28534
DOI: https://doi.org/10.1115/DETC2010-28534
View Paper titled, Modeling Electrostatic Actuator Pull in Behavior With Proper Orthogonal Decomposition
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Topics: Electrostatic actuators, Modeling, Principal component analysis, Finite element methods, Microelectromechanical systems, Engineering simulation, Simulation
Proceedings Papers

Modeling and Stability Analysis of Comb-Fingers in MEMS Electrostatic Actuators

Yang-Che Chen, Ian Chao-Ming Chang, Rongshun Chen, Max Ti-Kuang Hou
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 641-646, August 3–6, 2008
Paper No: DETC2008-49731
DOI: https://doi.org/10.1115/DETC2008-49731
View Paper titled, Modeling and Stability Analysis of Comb-Fingers in MEMS Electrostatic Actuators
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Topics: Electrostatic actuators, Microelectromechanical systems, Modeling, Stability, Deflection, Deformation, Design, Finite element methods, Finite element model
Proceedings Papers

A Study on Dynamic Analysis of the Electrostatic Actuator

Jinam Kim, Sangkyu Lee, Wonkyu Moon, Jinhwan Choi, Ilhan Park
Proc. ASME. IDETC-CIE2005, Volume 6: 5th International Conference on Multibody Systems, Nonlinear Dynamics, and Control, Parts A, B, and C, 1805-1812, September 24–28, 2005
Paper No: DETC2005-84664
DOI: https://doi.org/10.1115/DETC2005-84664
View Paper titled, A Study on Dynamic Analysis of the Electrostatic Actuator
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Topics: Dynamic analysis, Electrostatic actuators, Dynamics (Mechanics), Computer simulation, Dynamic response, Switches, Algorithms, Cantilevers, Computer software, Differential algebraic equations