This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.
Volume Subject Area:
12th International Conference on Micro- and Nanosystems
This content is only available via PDF.
Copyright © 2018 by ASME
You do not currently have access to this content.