Nano particle deposition system (NPDS) had been developed for the creation of micro/nano structures with multimaterials in order to develop the micro/nano devices on the basis of specific localized surface on the multilayer. However, micro structures fabricated by NPDS show different mechanical properties when it compared to bulk material because of its porous and uneven deposition structure. To achieve reasonable mechanical properties of the structure fabricated by nanoscale 3D printing system, it requires in-situ mechanical property test method. Herein, a new approach for in-situ nanomechanical characterization system using microforce sensor and nanomanipulator installed in focused ion beam system. In this research, experimental setup for mechanical characterization was developed and mechanical property test was done in Focused Ion Beam (FIB) system. The specimen was fabricated by FIB milling process, then manipulation and compression processes are operated by this characterization system with real time imaging. The test was done for silver microstructures fabricated by NPDS and results show weaker hardness and smaller young’s modulus than bulk material.
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ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 17–20, 2014
Buffalo, New York, USA
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-4635-3
PROCEEDINGS PAPER
In-Situ Characterization of Nano-Structures Fabricated by Focused Ion Beam (FIB) and Nano Particle Deposition System (NPDS)
Hyun-Taek Lee,
Hyun-Taek Lee
Seoul National University, Seoul, Korea
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Chung-Soo Kim,
Chung-Soo Kim
Massachusetts Institute of Technology, Cambridge, MA
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Hae-Sung Yoon,
Hae-Sung Yoon
Seoul National University, Seoul, Korea
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Ki-Hwan Jang,
Ki-Hwan Jang
Seoul National University, Seoul, Korea
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Jung-Oh Choi,
Jung-Oh Choi
Seoul National University, Seoul, Korea
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Sung-hoon Ahn
Sung-hoon Ahn
Seoul National University, Seoul, Korea
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Hyun-Taek Lee
Seoul National University, Seoul, Korea
Chung-Soo Kim
Massachusetts Institute of Technology, Cambridge, MA
Hae-Sung Yoon
Seoul National University, Seoul, Korea
Ki-Hwan Jang
Seoul National University, Seoul, Korea
Jung-Oh Choi
Seoul National University, Seoul, Korea
Sung-hoon Ahn
Seoul National University, Seoul, Korea
Paper No:
DETC2014-34258, V004T09A018; 6 pages
Published Online:
January 13, 2015
Citation
Lee, H, Kim, C, Yoon, H, Jang, K, Choi, J, & Ahn, S. "In-Situ Characterization of Nano-Structures Fabricated by Focused Ion Beam (FIB) and Nano Particle Deposition System (NPDS)." Proceedings of the ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems. Buffalo, New York, USA. August 17–20, 2014. V004T09A018. ASME. https://doi.org/10.1115/DETC2014-34258
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