We investigate dynamic switching modes of capacitive MEMS shunt switches using a biased AC signal. We show that the voltage requirements for dynamic switching are significantly less than those for static switching. We found out that significant reductions in actuation voltage can be obtained. However, the switching time is longer than that realized using static switching. We also examine various actuation schemes to further reduce the actuation voltage. As a result, we obtain 60% reduction in the actuation voltage.
- Design Engineering Division and Computers in Engineering Division
Dynamic Switching of MEMS Shunt Switches
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Khater, ME, Vummidi, K, Abdel-Rahman, EM, Nayfeh, AH, & Raman, S. "Dynamic Switching of MEMS Shunt Switches." Proceedings of the ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems. Montreal, Quebec, Canada. August 15–18, 2010. pp. 561-569. ASME. https://doi.org/10.1115/DETC2010-28487
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