We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pull-in point due to a cyclic-fold bifurcation.
- Design Engineering Division and Computers in Engineering Division
A Mass Sensing Technique for Electrostatically-Actuated MEMS
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Khater, ME, Abdel-Rahman, EM, & Nayfeh, AH. "A Mass Sensing Technique for Electrostatically-Actuated MEMS." Proceedings of the ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies. San Diego, California, USA. August 30–September 2, 2009. pp. 655-661. ASME. https://doi.org/10.1115/DETC2009-87551
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