Zener’s approximate expression for thermoelastic damping was first known attempt to quantify the thermoelastic damping. Recently, an exact expression of thermoelastic damping for thin unstressed beams, which is widely used, is arrived at. Further, it has been experimentally verified that application of tensile axial stress results in increase in the Q-factor. Since the existing expressions do not take into account the effect of axial stress thermoelastic-damping expression is revised in order to accommodate the effect of axial stress on Q-factor. This expression explains the general behavior observed in experiments. In limiting case of unstressed beam, this new expression converges to current expression for thermoelastic damping.
Volume Subject Area:2nd International Conference on Micro- and Nanosystems (MNS)
Topics:Thermoelastic damping, Stress, Q-factor
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