In this paper, we present the topology optimization procedure, fabrication and characterization results for electrothermally actuated polysilicon microgrippers for nanomanipulation purposes. In our previous work , we compared the performance of topology optimized actuator with the conventional three-beam electrothermal actuators  of the same size through finite-element simulations and experiments. Here, we further improve the topology optimized microgripper design and demonstrate the preliminary results of pick-and-place nanomanipulation experiments performed, where carbon nanotubes (CNTs) are transferred on four-point probes for electrical characterization.
- Design Engineering Division and Computers in Engineering Division
Topology Optimized Microgrippers for Nanomanipulation of Carbon Nanotubes
- Views Icon Views
- Share Icon Share
- Search Site
Sardan, O, Eichhorn, V, Petersen, DH, Fatikow, S, Sigmund, O, & Bo̸ggild, P. "Topology Optimized Microgrippers for Nanomanipulation of Carbon Nanotubes." Proceedings of the ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems. Brooklyn, New York, USA. August 3–6, 2008. pp. 799-801. ASME. https://doi.org/10.1115/DETC2008-49540
Download citation file: