The micromanipulator is a small amplitude, high resolution motion device to enhance robot accuracy by providing fine adjustments for precise error compensation and delicate force control. This paper addresses design objectives and optimization procedures for design of a unique 6 degree-of-freedom (DOF) fully-parallel micromanipulator. Using kinematic and dynamic modeling analysis, optimum geometric parameters are found which satisfy the desired motion range, effective force and velocity transmission and minimum input loading due to the bending of flexural joints. Computer simulations, optimization theory, and the finite element method are used to model, synthesize, and analyze micromanipulator components. Internal force analysis is performed to design the hardware components for critical load conditions. Using a CAD/CAM system, a full scale model of the mechanism has been created, and local stress and deflection analysis has been performed on the critical components.

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