This paper deals with two different methods to analyze the amplitude frequency response of an electrostatically actuated micro resonator. The methods used in this paper are the method of multiple scales, which is an analytical method with one mode of vibration. The other method is based on system of odes which is derived using the partial differential equation of motion, as well as the boundary conditions. This system is then solved using a built in matlab function known as BVP4C. Results are then shown comparing the two methods, under a variety of parameters, including the influence of damping, voltage, and fringe.
- Dynamic Systems and Control Division
Boundary Value Problem Method to Investigate Superharmonic Resonance of MEMS Resonators
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Beatriz, J, Botello, M, Reyes, C, & Caruntu, DI. "Boundary Value Problem Method to Investigate Superharmonic Resonance of MEMS Resonators." Proceedings of the ASME 2017 Dynamic Systems and Control Conference. Volume 3: Vibration in Mechanical Systems; Modeling and Validation; Dynamic Systems and Control Education; Vibrations and Control of Systems; Modeling and Estimation for Vehicle Safety and Integrity; Modeling and Control of IC Engines and Aftertreatment Systems; Unmanned Aerial Vehicles (UAVs) and Their Applications; Dynamics and Control of Renewable Energy Systems; Energy Harvesting; Control of Smart Buildings and Microgrids; Energy Systems. Tysons, Virginia, USA. October 11–13, 2017. V003T32A007. ASME. https://doi.org/10.1115/DSCC2017-5186
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