Technical Brief

Design and Experimental Testing of an Improved Large-Range Decoupled XY Compliant Parallel Micromanipulator1

[+] Author and Article Information
Jingjun Yu

Robotics Institute,
Beihang University,
Beijing 100191, China
e-mail: jjyu@buaa.edu.cn

Yan Xie, Zhenguo Li

Robotics Institute,
Beihang University,
Beijing 100191, China

Guangbo Hao

Department of Electrical and Electronic Engineering, School of Engineering,
University College Cork,
Cork, Ireland
e-mail: G.Hao@ucc.ie

This paper has been partly presented at the ASME 2014 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, DETC2014-34982.

2Corresponding author.

Manuscript received July 31, 2014; final manuscript received April 8, 2015; published online July 17, 2015. Assoc. Editor: Raffaele Di Gregorio.

J. Mechanisms Robotics 7(4), 044503 (Nov 01, 2015) (6 pages) Paper No: JMR-14-1185; doi: 10.1115/1.4030467 History: Received July 31, 2014; Revised April 08, 2015; Online July 17, 2015

There is an increasing need for XY compliant parallel micromanipulators (CPMs) providing good performance characteristics such as large motion range, well-constrained cross-axis coupling, and parasitic rotation. Decoupled topology design of the CPMs can easily realize these merits without increasing the difficulty of controlling. This paper proposes an improved 4-PP model on the basis of a classical 4-PP model and both of them are selected for manufacturing and testing to verify the effectiveness of the improvement. It has shown from experimental results that there is a large improvement on the performances of improved 4-PP compliant parallel manipulator (CPM): large range of motion up to 5 mm × 5 mm in the unidirection in the dimension of 311 mm × 311 mm × 24 mm, smaller compliance fluctuation (only 36.63% of that of the initial 4-PP model), smaller cross-axis coupling (only 28.10% of that of the initial 4-PP model generated by a single-axis 5 mm actuation), smaller in-plane parasitic yaw (only 57.14% of that of the initial 4-PP model generated by double-axis 5 mm actuation).

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Smith, S. T., and Chetwynd, D. G., 1992, Foundations of Ultraprecision Mechanism Design, CRC Press, New York.
Ananthasuresh, G. K., and Sridhar, K., 1995, “Designing Compliant Mechanisms,” Mech. Eng., 117(11), pp. 93–96.
Salaita, K., Wang, Y., and Mirkin, C. A., 2007, “Applications of Dip-Pen Nanolithography,” Nat. Nanotechnol., 2(3), pp. 145–155. [CrossRef] [PubMed]
Mirkin, C. A., 2001, “Dip-Pen Nanolithography: Automated Fabrication of Custom Multicomponent, Sub-100-Nanometer Surface Architectures,” MRS Bull., 26(7), pp. 535–538 [CrossRef]
Schitter, G., Thurner, P. J., and Hansma, P. K., 2008, “Design and Input-Shaping Control of a Novel Scanner for High-Speed Atomic Force Microscopy,” Mechatronics, 18(5–6), pp. 282–288. [CrossRef]
Ding, H., and Xiong, Z., 2006, “Motion Stages for Electronic Packaging Design and Control,” IEEE Rob. Autom. Mag., 13(4), pp. 51–61. [CrossRef]
Vettiger, P., Despont, M., Drechsler, U., Durig, U., Haberle, W., Lutwyche, M. I., Rothuizen, H. E., Stutz, R., Widmer, R., and Binnig, G. K., 2000, “The ‘Millipede’—More Than Thousand Tips for Future AFM Storage,” IBM J. Res. Dev., 44(3), pp. 323–340. [CrossRef]
Awtar, S., and Parmar, G., 2013, “Design of a Large Range XY Nanopositioning System,” ASME J. Mech. Rob., 5(2), p. 021008. [CrossRef]
Awtar, S., and Slocum, A. H., 2007, “Constraint-Based Design of Parallel Kinematic XY Flexure Mechanisms,” ASME J. Mech. Des., 129(8), pp. 816–830. [CrossRef]
Choi, K. B., and Kim, D. H., 2006, “Monolithic Parallel Linear Compliant Mechanism for Two Axes Ultraprecision Linear Motion,” Rev. Sci. Instrum., 77(6), p. 065106. [CrossRef]
Hao, G., and Kong, X., 2012, “A Novel Large-Range XY Compliant Parallel Manipulator With Enhanced Out-of-Plane Stiffness,” ASME J. Mech. Des., 134(6), p. 061009. [CrossRef]
Li, Y., and Xu, Q., 2009, “Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator,” IEEE Trans. Rob., 25(3), pp. 645–657. [CrossRef]
Li, Y., and Xu, Q., 2009, “Modeling and Performance Evaluation of a Flexure-Based XY Parallel Micromanipulator,” Mech. Mach. Theory, 44(12), pp. 2127–2152. [CrossRef]
Dinesh, M., and Ananthasuresh, G. K., 2010, “Micro-Mechanical Stages With Enhanced Range,” Int. J. Adv. Eng. Sci. Appl. Math., 2(1–2), pp. 35–43. [CrossRef]
Li, Y. M., Huang, J. M., and Tang, H., 2012, “A Compliant Parallel XY Micromotion Stage With Complete Kinematic Decoupling,” IEEE Trans. Autom. Sci. Eng., 9(3), pp. 538–553. [CrossRef]
Alper, S. E., Azgin, K., and Akin, T., 2006, “High-Performance SOI-MEMS Gyroscope With Decoupled Oscillation Modes,” 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, Jan. 22–26, pp. 70–73. [CrossRef]
Su, H. J., 2011, “Mobility Analysis of Flexure Mechanisms Via Screw Algebra,” ASME J. Mech. Rob., 3(4), p. 041010. [CrossRef]
Dong, J. Y., and Ferreira, P. M., 2009, “Electrostatically Actuated Cantilever With SOI-MEMS Parallel Kinematic XY Stage,” J. Microelectromech. Syst., 18(3), pp. 641–651. [CrossRef]
Li, Y. M., and Xu, Q. S., 2006, “A Novel Design and Analysis of a 2-DOF Compliant Parallel Micromanipulator for Nanomanipulation,” IEEE Trans. Autom. Sci. Eng., 3(3), pp. 247–254. [CrossRef]
Trease, B. P., Moon, Y. M., and Kota, S., 2005, “Design of Large-Displacement Compliant Joints,” ASME J. Mech. Des., 127(4), pp. 788–798. [CrossRef]
Howell, L. L., 2001, Compliant Mechanisms, Wiley, New York.
Shan, H. Z., 2009, Mechanics of Materials (I), Higher Education Press, B eijing, (in Chinese).


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Fig. 1

Various kinematic configurations of decoupled rigid-body XY CPMs (Xi and Yi denote the P joint along X- and Y-axes, respectively): (a) 2-PP Model, (b) 4-PP Model, and (c) 4-PP&1-E Model

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Fig. 2

Distributed-compliance compliant modules (all the values of the parameters will be discussed later in Sec. 3): (a) P joint connected to base, (b) passive P joint connected to motion stage, and (c) a PP leg/chain

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Fig. 3

An improved 4-PP decoupled XY CPM: (a) new 4-PP model with subchains connected and (b) embodiment of the improved XY CPM

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Fig. 4

Experimental scheme (only half of the 4-PP model (Fig. 1(b)) is represented due to the symmetry)

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Fig. 5

Proof-of-concept prototypes: (a) original 4-PP experimental platform and (b) improved 4-PP experimental platform

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Fig. 6

Load–displacement curves: (a) force versus displacement under the load condition A and (b) force versus displacement under the load condition B

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Fig. 7

The input displacement following curves: (a) input- versus output-displacement under the load condition A and (b) input- versus output-displacement under the load condition B

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Fig. 8

Compliance curves: (a) force versus compliance under the load condition A and (b) force versus compliance under the load condition B

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Fig. 9

Cross-axis coupling: (a) inputs versus outputs coupling error under the load condition A and (b) inputs versus outputs coupling error under the load condition B

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Fig. 10

Comparison of in-plane yaw motion from nonlinear FEA




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