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Research Papers

Design and Modeling of an Active Five-Axis Compliant Micromanipulator

[+] Author and Article Information
G. R. Jayanth

Department of Instrumentation
and Applied Physics,
Indian Institute of Science,
Bangalore 560012, India
e-mail: jayanth@isu.iisc.ernet.in

C. H. Menq

Fellow ASME
Department of Mechanical
and Aerospace Engineering,
The Ohio State University,
Columbus, OH 43210
e-mail: menq.1@osu.edu

1Corresponding author.

Contributed by the Mechanisms and Robotics Committee of ASME for publication in the JOURNAL OF MECHANISMS AND ROBOTICS. Manuscript received August 29, 2013; final manuscript received May 21, 2014; published online July 16, 2014. Assoc. Editor: Anupam Saxena.

J. Mechanisms Robotics 6(4), 041014 (Jul 16, 2014) (10 pages) Paper No: JMR-13-1168; doi: 10.1115/1.4027947 History: Received August 29, 2013; Revised May 21, 2014

This paper presents the design and modeling of an active five-axis compliant micromanipulator whose tip orientation can be independently controlled by large angles about two axes and the tip-position can be controlled in three dimensions. These features enable precise control of the contact point of the tip and the tip–sample interaction forces with three-dimensional nanoscale objects, including those features that are conventionally inaccessible. Control of the tip-motion is realized by means of electromagnetic actuation combined with a novel kinematic and structural design of the micromanipulator, which, in addition, also ensures compatibility with existing high-resolution motion-measurement systems. The design and analysis of the manipulator structure and those of the actuation system are first presented. Quasi-static and dynamic lumped-parameter (LP) models are then derived for the five-axis compliant micromanipulator. Finite element (FE) analysis is employed to validate these models, which are subsequently used to study the effects of tip orientation on the mechanical characteristics of the five-axis micromanipulator. Finally, a prototype of the designed five-axis manipulator is fabricated by means of focused ion-beam milling (FIB).

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References

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Figures

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Fig. 1

Schematics of (a) the five-axis micromanipulator and (b) electromagnetic actuation system, comprised of current-carrying wires and solenoid coils

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Fig. 2

Schematics showing the geometry of (a) the overall micromanipulator, (b) the manipulator neck, and (c) the manipulator body, comprised of sections B1, B2, and B3

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Fig. 3

Schematics showing (a) the geometry of X, Y-solenoid coils used for tip orientation control and (b) X, Y-parallel wires and the Z-coil used for tip-position control. In practice, the actuators are much larger than the magnetic particle and are fixed to the laboratory frame.

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Fig. 4

Schematics showing (a) the magnetic and tip–sample forces acting on the manipulator and (b) the inertial force acting at the head

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Fig. 5

FE-analysis showing the capability of the micromanipulator-tip to be actuated along (a) X-axis, (b) Y-axis, (c) Z-axis and rotated about (d) X-axis and (e) Y-axis

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Fig. 6

(a) Dependence of the angle of twist (θ) of the neck on the torque applied along its axis and (b) variation of the torsional stiffness kθ∥n with θ

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Fig. 7

Variation of (a) the angular stiffness kθ⊥n with θ and (b) the linear stiffness kxxn with θ

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Fig. 8

Variation of the overall stiffness with θX and θY along (a) the X-axis, (b) Y-axis, and (c) Z-axis

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Fig. 9

(a)–(f) Variation of the first six eigenfrequencies fi(i = 1,…6) with θX and θY

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Fig. 10

(a) and (b) Schematics showing the steps in transplantation of the tip from probe-2 to probe-1. (c) SEM image of the probe with transplanted tip.

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Fig. 11

SEM of the five-axis micromanipulator fabricated by means of FIB. The inset shows the close-up of the neck.

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