Research Papers

Design of a Large Range XY Nanopositioning System

[+] Author and Article Information
Shorya Awtar

e-mail: awtar@umich.edu

Gaurav Parmar

Precision Systems Design Laboratory,
Mechanical Engineering,
University of Michigan,
Ann Arbor, MI 48109

1Corresponding author.

Contributed by the Mechanisms and Robotics Committee of ASME for publication in the Journal of Mechanisms and Robotics. Manuscript received August 22, 2012; final manuscript received January 11, 2013; published online April 12, 2013. Assoc. Editor: Yuefa Fang.

J. Mechanisms Robotics 5(2), 021008 (Apr 12, 2013) (10 pages) Paper No: JMR-12-1125; doi: 10.1115/1.4023874 History: Received August 22, 2012; Revised January 11, 2013

Achieving large motion range (>1 mm) along with nanometric motion quality (<10 nm) simultaneously has been a key challenge in nanopositioning systems. Practical limitations associated with the individual physical components (bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of currently available nanopositioning systems to approximately 100 μm per axis. This paper presents a novel physical system layout, comprising a bearing, actuators, and sensors, that enables large range XY nanopositioning. The bearing is based on a parallel-kinematic XY flexure mechanism that provides a high degree of geometric decoupling between the two motion axes by avoiding geometric over-constraint, provides actuator isolation that allows the use of large-stroke single-axis actuators, and enables a complementary end-point sensing scheme using commonly available sensors. These attributes help achieve 10 mm × 10 mm motion range in the proposed nanopositioning system. Having overcome the physical system design challenges, a dynamic model of the proposed nanopositioning system is created and verified via system identification. In particular, dynamic nonlinearities associated with the large displacements of the flexure mechanism and resulting controls challenges are identified. The physical system is fabricated, assembled, and tested to validate its simultaneous large range and nanometric motion capabilities. Preliminary closed-loop test results, which highlight the potential as well as pending challenges associated with this new design configuration, are presented.

Copyright © 2013 by ASME
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Hicks, T. R., and Atherton, P. D., 1997, The Nanopositioning Book, Queensgate Instruments Ltd., Cypress, CA.
Sato, K., 2006, “Trend of Precision Positioning Technology,” Proceedings of the ABCM Symposium Series in Mechatronics, pp. 739–750.
Jordan, S., and Lula, B., 2005, “Nanopositioning: The Technology and the Options,” The 2005 Photonics Handbook, Laurin Publications, Pittsfield, MA.
nPoint Inc., 2002, Application Note: Nanopositioning Tools and Techniques for R&D Applications, nPoint Inc., Middleton, WI.
Devasia, S., Eleftheriou, E., and Moheimani, S. O. R., 2007, “A Survey of Control Issues in Nanopositioning,” IEEE Trans. Control Syst. Technol., 15(5), pp. 802–823. [CrossRef]
Queensgate Instruments, 2013, “Product Model # NPS-XY-100A,” Queensgate Instruments, Cypress, CA.
Physik Instrumente, 2011, “Product Model # P-541.2, Piezo XY Nanopositioning Stage,” Physik Instrumente, Karlsruhe, Germany.
Mad City Labs, 2013, “Product Model # NanoBio2200,” Mad City Labs, Madison, WI.
PiezoSystem Jena, 2013, “Product Model # PXY400,” PiezoSystem Jena, Jena, Germany.
Aphale, S. S., Bhikkaji, B., and Moheimani, S. O. R., 2008, “Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms,” IEEE Trans. Nanotechnol., 7(1), pp. 79–90. [CrossRef]
Dai, G., Pohlenz, F., Danzebrink, H.-U., Xu, M., Hasche, K., and Wilkening, G., 2004, “Metrological Large Range Scanning Probe Microscope,” Rev. Sci. Instrum., 75(4), pp. 962–969. [CrossRef]
Hausotte, T., Jaeger, G., Manske, E., Hofmann, N., and Dorozhovets, N., 2005, “Application of a Positioning and Measuring Machine for Metrological Long-Range Scanning Force Microscopy,” Proc. SPIE, 5878, pp. 1–12 [CrossRef].
Kramar, J. A., 2005, “Nanometre Resolution Metrology With the Molecular Measuring Machine,” Meas. Sci. Technol., 16(11), pp. 2121–2128. [CrossRef]
Sinno, A., Ruaux, P., Chassagne, L., Topçu, S., Alayli, Y., Lerondel, G., Blaize, S., Bruyant, A., and Royer, P., 2007, “Enlarged Atomic Force Microscopy Scanning Scope: Novel Sample-Holder Device With Millimeter Range,” Rev. Sci. Instrum., 78(9), pp. 1–7. [CrossRef]
Weckenmann, A., and Hoffmann, J., 2007, “Long Range 3D Scanning Tunnelling Microscopy,” CIRP Ann., 56(1), pp. 525–528. [CrossRef]
Salaita, K., Wang, Y., and Mirkin, C. A., 2007, “Applications of Dip-Pen Nanolithography,” Nature Nanotechnol., 2(3), pp. 145–155. [CrossRef]
Mirkin, C. A., 2001, “Dip-Pen Nanolithography: Automated Fabrication of Custom Multicomponent, Sub-100-Nanometer Surface Architectures,” MRS Bull., 26(7), pp. 535–538. [CrossRef]
Sebastian, A., Pantazi, A., Pozidis, H., and Eleftheriou, E., 2008, “Nanopositioning for Probe-Based Data Storage (Applications of Control),” IEEE Control Syst. Mag., 28(4), pp. 26–35. [CrossRef]
Van de Moosdijk, M., Van den Brink, E., Simon, K., Friz, A., Phillipps, G. N., Travers, R. J., and Raaymakers, E., 2002, “Collinearity and Stitching Performance on an ASML Stepper,” Proc. SPIE, 4688, pp. 858–866. [CrossRef]
Liu, H., Lu, B., Ding, Y., Tang, Y., and Li, D., 2003, “A Motor-Piezo Actuator for Nano-Scale Positioning Based on Dual Servo Loop and Nonlinearity Compensation,” J. Micromech. Microeng., 13(2), pp. 295–299. [CrossRef]
Han, D., and Zhenhua, X., 2006, “Motion Stages for Electronic Packaging Design and Control,” IEEE Rob. Autom. Mag., 13, pp. 51–61. [CrossRef]
O'Brien, W., 2005, “Long-Range Motion With Nanometer Precision,” Photonics Spectra, pp. 80–81.
Fan, K.-C., Fei, Y., Yu, X., Wang, W., and Chen, Y., 2007, “Study of a Noncontact Type Micro-CMM With Arch-Bridge and Nanopositioning Stages,” Rob. Comput.-Integr. Manufact., 23(3), pp. 276–284. [CrossRef]
Maeda, G. J., and Sato, K., 2008, “Practical Control Method for Ultra-Precision Positioning Using a Ballscrew Mechanism,” Precis. Eng., 32(4), pp. 309–318. [CrossRef]
Kim, W.-j., Verma, S., and Shakir, H., 2007, “Design and Precision Construction of Novel Magnetic-Levitation-Based Multi-Axis Nanoscale Positioning Systems,” Precis. Eng., 31(4), pp. 337–350. [CrossRef]
Holmes, M., Hocken, R., and Trumper, D., 2000, “The Long-Range Scanning Stage: A Novel Platform for Scanned-Probe Microscopy,” Precis. Eng., 24(3), pp. 191–209. [CrossRef]
Maeda, G. J., Sato, K., Hashizume, H., and Shinshi, T., 2006, “Control of an XY Nano-Positioning Table for a Compact Nano-Machine Tool,” JSME Int. J., Ser. C, 49(1), pp. 21–27. [CrossRef]
Dejima, S., Gao, W., Katakura, K., Kiyono, S., and Tomita, Y., 2005, “Dynamic Modeling, Controller Design and Experimental Validation of a Planar Motion Stage for Precision Positioning,” Precis. Eng., 29(3), pp. 263–271. [CrossRef]
Culpepper, M. L., and Anderson, G., 2004, “Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism,” Precis. Eng., 28(4), pp. 469–482. [CrossRef]
Choi, Y.-M., Kim, J. J., Kim, J., and Gweon, D. G., 2008, “Design and Control of a Nanoprecision XY Theta Scanner,” Rev. Sci. Instrum., 79(4), p. 045109. [CrossRef] [PubMed]
Pahk, H. J., Lee, D. S., and Park, J. H., 2001, “Ultra Precision Positioning System for Servo Motor-Piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation,” Int. J. Mach. Tools Manuf., 41(1), pp. 51–63. [CrossRef]
Parmar, G., Hiemstra, D., and Awtar, S., 2012, “Large Dynamic Range Nanopositioning Using Iterative Learning Control,” Proceedings of the ASME Dynamic Systems and Control Conference.
Fischer, F. L., 1981, “Symmetrical 3 DOF Compliance Structure,” U.S. Patent No. 4447048.
Smith, A. R., Gwo, S., and Shih, C.-K. K., 1994, “A New High Resolution Two-Dimensional Micropositioning Device for Scanning Probe Microscopy,” Rev. Sci. Instrum., 64(10), pp. 3216–3219. [CrossRef]
Dagalakis, N. G., Kramar, J. A., Amatucci, E., and Bunch, R., 2001, “Kinematic Modelling and Analysis of Planer Micro-positioner,” Proceedings of the ASPE 16th Annual Meeting, pp. 135–138.
Yao, Q., Dong, J., and Ferreira, P. M., 2007, “Design, Analysis, Fabrication and Testing of a Parallel-Kinematic Micropositioning XY Stage,” Int. J. Mach. Tools Manuf., 47(6), pp. 946–961. [CrossRef]
Chen, K. S., Trumper, D. L., and Smith, S. T., 2002, “Design and Control for an Electromagnetically Driven X-Y-[Theta] Stage,” Precis. Eng., 26(4), pp. 355–369. [CrossRef]
Awtar, S., 2004, “Analysis and Synthesis of Planer Kinematic XY Mechanisms,” Sc.D. thesis, Massachusetts Institute of Technology, Cambridge, MA.
Awtar, S., and Slocum, A. H., 2005, “Topology Evolution of High Performance XY Flexure Stages,” ASPE Annual Meeting, Norfolk, VA.
Zhelyaskov, V., Broderick, M., Raphalovitz, A., and Davies, B. L., 2006, “Automated Piezoelectric Nanopositioning Systems—Long Travel Ranges and Accurate Angular Movement Create New Opportunities in Biomedical Manipulation Systems,” IEEE Circuits Devices Mag., 22, pp. 75–78. [CrossRef]
Klocke, V., 2002, “Engineering in the Nanocosmos: Nanorobotics Moves Kilograms of Mass,” J. Nanosci. Nanotechnol., 2(3–4), pp. 435–440. [CrossRef] [PubMed]
Gao, W., Dejima, S., Yanai, H., Katakura, K., Kiyono, S., and Tomita, Y., 2004, “A Surface Motor-Driven Planar Motion Stage Integrated With an XY[Theta]Z Surface Encoder for Precision Positioning,” Precis. Eng., 28(3), pp. 329–337. [CrossRef]
Optra Inc., “Product # NanoGrid A Planar Encoder,” Optra Inc., Topsfield, MA.
SIOS Meßtechnik GmbH, “Product # Series SP-D Double Plane-Mirror Interferometer,” SIOS Meßtechnik GmbH, Ilmenau, Germany.
Awtar, S., and Slocum, A. H., 2007, “Constraint-Based Design of Parallel Kinematic XY Flexure Mechanisms,” ASME J. Mech. Des., 129(8), pp. 816–830. [CrossRef]
Awtar, S., Slocum, A. H., and Sevincer, E., 2007, “Characteristics of Beam-Based Flexure Modules,” ASME J. Mech. Des., 129(6), pp. 625–639. [CrossRef]
Awtar, S., 2010, “Precision Systems Design Laboratory,” University of Michigan, http://www.umich.edu/~awtar
Lee, M. G., Lee, S. Q., and Gweon, D. G., 2004, “Analysis of Halbach Magnet Array and Its Application to Linear Motor,” Mechatronics, 14, pp. 115–128. [CrossRef]
Teo, T. J., Chen, I. M., Yang, G., and Lin, W., 2008, “A Flexure-Based Electromagnetic Linear Actuator,” Nanotechnology, 19(31), pp. 1–10. [CrossRef] [PubMed]
Youm, W., Jung, J., Lee, S., and Park, K., 2008, “Control of Voice Coil Motor Nanoscanners for an Atomic Force Microscopy System Using a Loop Shaping Technique,” Rev. Sci. Instrum., 79(1), p. 013707. [CrossRef] [PubMed]
Fukada, S., and Nishimura, K., 2007, “Nanometric Positioning Over a One-Millimeter Stroke Using a Flexure Guide and Electromagnetic Linear Motor,” Int. J. Precis. Eng. Manuf, 8, pp. 49–53.
Rapuano, S., Daponte, P., Balestrieri, E., Vito, L. D., Tilden, S. J., Max, S., and Blair, J. J., 2005, “ADC Parameters and Characteristics—Part 6 in a Series of Tutorials in Instrumentation and Measurement,” IEEE Instrum. Meas. Mag., 8(5), pp. 44–54. [CrossRef]
Cirrus Logic, “Application Note 13: Voltage to Current Conversion,” Cirrus Logic, Austin, TX.
Book, W. J., 1993, “Controlled Motion in an Elastic World,” ASME, J. Dyn. Syst. Meas. Control, 115(2B), pp. 252–261. [CrossRef]
Spector, V. A., and Flashner, H., 1990, “Modeling and Design Implications of Noncollocated Control in Flexible Systems,” ASME, J. Dyn. Syst., Meas. Control, 112(2), pp. 186–193. [CrossRef]
Lee, C., and Salapaka, S. M., 2009, “Two Degree of Freedom Control for Nanopositioning Systems: Fundamental Limitations, Control Design, and Related Trade-Offs,” Proceedings of the American Controls Conference, pp. 1664–1669.
Skogestad, S., and Postlethwaite, I., 2005, Multivariable Feedback Control, Analysis and Design, Wiley, New York.


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Fig. 1

Proposed constraint map

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Fig. 2

Physical system schematic

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Fig. 3

Proposed large range XY nanopositioning system: proof-of-concept prototype

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Fig. 4

Lumped spring model of the double parallelogram flexure module along its axial and transverse directions

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Fig. 5

5-DOF spring-mass model of the nanopositioning system along the X direction

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Fig. 6

Comparison between experimental and analytical X direction frequency response: (a) yms = 0 and (b) yms = 5 mm

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Fig. 8

Experimentally measured frequency response of the loop transfer function L(s)

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Fig. 9

Experimentally measured frequency response of the closed-loop transfer function

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Fig. 10

Experimentally measured transfer function from amplifier noise to motion stage position

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Fig. 11

Amplitude distribution of the open-loop and closed-loop positioning noise

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Fig. 12

Motion stage position response for 1.5 mm steps and 20 nm steps along X axis

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Fig. 13

Motion stage tracking a 5 mm diameter circle




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