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Research Papers

Design of a Large Range XY Nanopositioning System

[+] Author and Article Information
Shorya Awtar

e-mail: awtar@umich.edu

Gaurav Parmar

Precision Systems Design Laboratory,
Mechanical Engineering,
University of Michigan,
Ann Arbor, MI 48109

1Corresponding author.

Contributed by the Mechanisms and Robotics Committee of ASME for publication in the Journal of Mechanisms and Robotics. Manuscript received August 22, 2012; final manuscript received January 11, 2013; published online April 12, 2013. Assoc. Editor: Yuefa Fang.

J. Mechanisms Robotics 5(2), 021008 (Apr 12, 2013) (10 pages) Paper No: JMR-12-1125; doi: 10.1115/1.4023874 History: Received August 22, 2012; Revised January 11, 2013

Achieving large motion range (>1 mm) along with nanometric motion quality (<10 nm) simultaneously has been a key challenge in nanopositioning systems. Practical limitations associated with the individual physical components (bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of currently available nanopositioning systems to approximately 100 μm per axis. This paper presents a novel physical system layout, comprising a bearing, actuators, and sensors, that enables large range XY nanopositioning. The bearing is based on a parallel-kinematic XY flexure mechanism that provides a high degree of geometric decoupling between the two motion axes by avoiding geometric over-constraint, provides actuator isolation that allows the use of large-stroke single-axis actuators, and enables a complementary end-point sensing scheme using commonly available sensors. These attributes help achieve 10 mm × 10 mm motion range in the proposed nanopositioning system. Having overcome the physical system design challenges, a dynamic model of the proposed nanopositioning system is created and verified via system identification. In particular, dynamic nonlinearities associated with the large displacements of the flexure mechanism and resulting controls challenges are identified. The physical system is fabricated, assembled, and tested to validate its simultaneous large range and nanometric motion capabilities. Preliminary closed-loop test results, which highlight the potential as well as pending challenges associated with this new design configuration, are presented.

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Figures

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Fig. 1

Proposed constraint map

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Fig. 2

Physical system schematic

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Fig. 3

Proposed large range XY nanopositioning system: proof-of-concept prototype

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Fig. 4

Lumped spring model of the double parallelogram flexure module along its axial and transverse directions

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Fig. 5

5-DOF spring-mass model of the nanopositioning system along the X direction

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Fig. 6

Comparison between experimental and analytical X direction frequency response: (a) yms = 0 and (b) yms = 5 mm

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Fig. 8

Experimentally measured frequency response of the loop transfer function L(s)

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Fig. 9

Experimentally measured frequency response of the closed-loop transfer function

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Fig. 10

Experimentally measured transfer function from amplifier noise to motion stage position

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Fig. 11

Amplitude distribution of the open-loop and closed-loop positioning noise

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Fig. 12

Motion stage position response for 1.5 mm steps and 20 nm steps along X axis

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Fig. 13

Motion stage tracking a 5 mm diameter circle

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