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Research Papers

Relationship Among Input-Force, Payload, Stiffness, and Displacement of a 6-DOF Perpendicular Parallel Micromanipulator

[+] Author and Article Information
Yi Yue, Xianchao Zhao

State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P.R. China

Feng Gao1

State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, P.R. Chinafengg@sjtu.edu.cn

Q. Jeffrey Ge

Department of Mechanical Engineering, State University of New York at Stony Brook, Stony Brook, NY 11794-2300

1

Corresponding author.

J. Mechanisms Robotics 2(1), 011007 (Nov 24, 2009) (9 pages) doi:10.1115/1.4000525 History: Received February 06, 2009; Revised August 02, 2009; Published November 24, 2009

Micromanipulators play an important role in the precision engineering field from optical stages to micro-electromechanical systems for their excellent performances. In this paper, a 6-DOF perpendicular parallel micromanipulator (PPMM) is proposed and its prototype is developed. The isotropy and decoupled characteristics of the 6-DOF PPMM are discussed. The relationship among input-force, payload, stiffness, and displacement (IPSD) of the 6-DOF PPMM is studied and the model of the relationship among the IPSD is derived in an analytical style. The relation between voltage value of piezoelectric actuator and output displacement is obtained base on an IPSD model. Finally, the simulations by finite element method and the test of the prototype of the 6-DOF PPMM are performed. Compared with the results of simulations and the test, the feasibility of IPSD model is verified. The proposed model is useful for both digital control of the 6-DOF PPMMs and design of the micromanipulators.

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Figures

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Figure 1

6-DOF PPMM mechanism

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Figure 2

The prototype of 6-DOF PPMM

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Figure 3

One leg with flexure hinges

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Figure 4

Flexure prismatic joint

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Figure 5

Flexure spherical joint with 3-DOF

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Figure 6

The mechanical sketch of 6-DOF CPMPS

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Figure 7

The sketch of PSS leg

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Figure 8

Simulation model by FEM

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Figure 9

The translation comparison between theory and FEM

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Figure 10

The rotation comparison between theory and FEM

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Figure 11

6-PSS parallel micromanipulator system

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Figure 12

System flow chart

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Figure 13

The translation comparison between theory and test

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Figure 14

The rotation comparison between theory and test

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